Correlation between scanning-probe-induced spots and fixed positive charges in thin HfO<sub>2</sub> films

MIYATA Noriyuki; OTA Hiroyuki; ICHIKAWA Masakazu

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J-GLOBAL ID：200902260006561598 Reference number：05A0374635

Correlation between scanning-probe-induced spots and fixed positive charges in thin HfO₂ films

HfO₂薄膜における走査プローブ誘起スポットと固定正電荷との相関

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Author (3)： , ,
Material：
Volume： 86 Issue： 11 Page： 112906.1-112906.3 Publication year： Mar. 14, 2005
JST Material Number： H0613A ISSN： 0003-6951 CODEN： APPLAB Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Oxide thin films , Metal-insulator-semiconductor structures

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Correlation between scanning-probe-induced spots and fixed positive charges in thin HfO2 films

Correlation between scanning-probe-induced spots and fixed positive charges in thin HfO₂ films