Art

J-GLOBAL ID：200902260359206880   Reference number：04A0569051

Metal plasma source for PBII using arc-like discharge with hot cathode

熱陰極によるアーク状放電を用いたPBII用金属プラズマ源

Author (6)： CHAYAHARA A (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN) ,  MOKUNO Y (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN) ,  KINOMURA A (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN) ,  TSUBOUCHI N (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN) ,  HECK C (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN) ,  HORINO Y (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN)
Material： Surface & Coatings Technology  (Surf Coat Technol)
Volume： 186  Issue： 1/2  Page： 157-160  Publication year： Aug. 02, 2004 
JST Material Number： D0205C  ISSN： 0257-8972  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *ion implantation ,...
Semi thesaurus term： negative electrode ,...

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JST classification (2)： Plasma devices  (BJ02082I) ,  Irradiational changes in properties and structures in general  (BK16121W)

Terms in the title (4)： 熱陰極 ,  アーク ,  放電 ,  金属プラズマ