Art
J-GLOBAL ID：200902260529832129   Reference number：05A0059674

レーザ光散乱法によるSiウエハ表面の微小欠陥計測

Author (2)：
INOUE HARUYUKI

About INOUE HARUYUKI

(大阪大)

About 大阪大

, 
KATAOKA TOSHIHIKO

About KATAOKA TOSHIHIKO

(大阪大)

About 大阪大


Material：
光アライアンス  (Optical Alliance)

About 光アライアンス


Volume： 16  Issue： 2  Page： 36-41  Publication year： Feb. 01, 2005 
JST Material Number： L1746A  ISSN： 0917-026X  CODEN： HARAEW  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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laser irradiation

About laser irradiation

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
マイクロスクラッチ

About マイクロスクラッチ


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Optical instruments and techniques in general 
(BD07010S)

About Optical instruments and techniques in general

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
レーザ

About レーザ

, 
光散乱法

About 光散乱法

, 
Siウエハ

About Siウエハ

, 
微小

About 微小

, 
欠陥

About 欠陥

, 
計測

About 計測


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