Rchr
J-GLOBAL ID：200901076082331780   Update date: Sep. 12, 2022

Inoue Haruyuki

イノウエ ハルユキ | Inoue Haruyuki
Affiliation and department：
Osaka University Graduate School of Engineering, Division of Precision Science & Technology and Applied Physics

About Osaka University Graduate School of Engineering, Division of Precision Science & Technology and Applied Physics


Research field  (1)： Optical engineering and photonics
Research keywords  (2)： 応用光学 ,  Applied Optics
Research theme for competitive and other funds  (4)：
  • *
  • 光散乱によるSiウエハ表面上の微粒子・微小欠陥の計測
  • *
  • Measurement of Ultra Fine Particles and Very Small Defects on the Si Wafer Surface Using a Light Scattering Method
MISC (20)：
ｍore...
Education (2)：
  • - 1971 Osaka Institute of Technology Faculty of Engineering Department of Mechanical Engineering
  • - 1971 Osaka Institute of Technology Faculty of Engineering
Professional career (1)：
  • Doctor(Engineering) (Osaka University)
Awards (3)：
  • 2003 - 精密工学賞
  • 1995 - 精密工学会関西支部講演論文集
  • 1995 - 精密工学会 沼田記念論文賞
Association Membership(s) (2)：
応用物理学会 ,  精密工学会
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