Art

J-GLOBAL ID：200902261311956779   Reference number：09A0882423

固体熱物性 薄膜の熱物性計測と標準 -熱拡散時間の標準薄膜-

Author (3)： YAGI TAKASHI (産業技術総合研 計測標準研究部門) ,  TAKETOSHI NAOYUKI (産業技術総合研 計測標準研究部門) ,  BABA TETSUYA (産業技術総合研 計測標準研究部門)
Material： 計測標準と計量管理  (Measurement Standards and Metrology Management)
Volume： 59  Issue： 2  Page： 42-48  Publication year： Aug. 20, 2009 
JST Material Number： F0771A  ISSN： 1880-1420  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： physical property ,  heat characteristic ,  standard substance ,  *weighing institution ,  material accounting ,  traceability ,  *primary standard ,  calibration ,  precision measurement ,  thin film ,  *thermal diffusivity ,  laser irradiation ,  laser heating
Semi thesaurus term： thermophysical property ,  thermal diffusivity ,  *laser flash method

JST classification (2)： Specific heat and thermal conduction in metals  (BL05022V) ,  Measuring methods and instruments of other thermal variables  (AD06040R)

Reference (17)：

• N. Taketoshi, T. Baba and A. Ono,“Observation of Heat Diffusion across Submicrometer Metal Thin Films Using a Picosecond Thermoreflectance Technique” Japanese Journal of Applied Physics, 38, L1268.,(1999)
• N. Taketoshi, T. Baba and A. Ono,“Development of a thermal diffusivity measurement system for metal thin films using a picosecond thermoreflectance technique”, Measurement Science and Technology, 12, 2064-2073,(2001)
• N. Taketoshi, T. Baba E. Schaub and A. Ono “Homodyne detection technique using spontaneously generated reference signal in picosecond thermoreflectance measurements” Review Science Instruments, 74, 5226-5230,(2003)
• N. Taketoshi, T. Baba and A. Ono “Electrical delay technique in the picosecond thermoreflectance method for thermophysical property measurements of thin films” Review Science Instruments, 76, 094903.,(2005)
• T. Baba and A. Ono “Improvement of the laser flash method to reduce uncertainty in thermal diffusivity measurements” Measurement Science and Technology, 12, 2046-2057,(2001)

Terms in the title (6)： 固体 ,  熱物性 ,  薄膜 ,  計測 ,  標準 ,  熱拡散