Art
J-GLOBAL ID：200902265771886936   Reference number：09A1238306

A flexible electro-rheological microvalve (FERV) based on SU-8 cantilever structures and its application to microactuators

SU-8片持梁構造によるフレキシブルなエレクトロレオロジカルマイクロバルブ(FERV)とそのマイクロアクチュエータへの応用
Author (4)：
KIM Joon-wan

About KIM Joon-wan

(Precision and Intelligence Lab., Tokyo Inst. of Technol., R2-42, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, JPN)

About Precision and Intelligence Lab., Tokyo Inst. of Technol., R2-42, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, JPN

, 
YOSHIDA Kazuhiro

About YOSHIDA Kazuhiro

(Precision and Intelligence Lab., Tokyo Inst. of Technol., R2-42, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, JPN)

About Precision and Intelligence Lab., Tokyo Inst. of Technol., R2-42, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, JPN

, 
KOUDA Kumiko

About KOUDA Kumiko

(Graduate School, Tokyo Inst. of Technol., JPN)

About Graduate School, Tokyo Inst. of Technol., JPN

, 
YOKOTA Shinichi

About YOKOTA Shinichi

(Precision and Intelligence Lab., Tokyo Inst. of Technol., R2-42, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, JPN)

About Precision and Intelligence Lab., Tokyo Inst. of Technol., R2-42, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, JPN


Material：
Sensors and Actuators. A. Physical  (Sens Actuators A)

About Sensors and Actuators. A. Physical


Volume： 156  Issue： 2  Page： 366-372  Publication year： Dec. 2009 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*ER fluid

About ER fluid

, 
micro structure

About micro structure

, 
*valve

About valve

, 
MEMS

About MEMS

, 
flexibility

About flexibility

, 
*microactuator

About microactuator

, 
photoresist

About photoresist

, 
cantilever beam

About cantilever beam

, 
micromachining

About micromachining

, 
fluidics

About fluidics

, 
hydraulic circuit

About hydraulic circuit

, 
interposition

About interposition

, 
flow control valve

About flow control valve

, 
photoresist SU-8

About photoresist SU-8

, 
*microvalve

About microvalve


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
SU-8

About SU-8

, 
*microvalve

About microvalve


JST classification (2)：
JST classification
Category name(code) classified by JST.
Design,manufacturing,and components of robots 
(IC04013A)

About Design,manufacturing,and components of robots

,  Fluidic control equipment 
(IC02030J)

About Fluidic control equipment

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
SU-8

About SU-8

, 
片持梁

About 片持梁

, 
マイクロアクチュエータ

About マイクロアクチュエータ

, 
応用

About 応用


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