Art
J-GLOBAL ID:200902266798156081   Reference number:03A0471242

MgO deposition using reactive ionized sputtering

反応性イオン化スパッタリングを用いたMgO堆積
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Volume: 435  Issue: 1/2  Page: 154-160  Publication year: Jul. 01, 2003 
JST Material Number: B0899A  ISSN: 0040-6090  Document type: Article
Article type: 短報  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Oxide thin films  ,  Techniques and equipment of thin film deposition 
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