Art

J-GLOBAL ID：200902267884888822   Reference number：06A0605831

Hydrogen plasma etching mechanism on (001) diamond

(001)ダイアモンド上での水素プラズマエッチング機構

Author (12)： RI Sung-gi (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki ...) ,  RI Sung-gi (Core Res. for Evolutional Sci. and Technol. (CREST), Japan Sci. and Technol. Agency (JST), c/o AIST, JPN) ,  WATANABE Hideyuki (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki ...) ,  WATANABE Hideyuki (Core Res. for Evolutional Sci. and Technol. (CREST), Japan Sci. and Technol. Agency (JST), c/o AIST, JPN) ,  OGURA Masahiko (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki ...) ,  OGURA Masahiko (Core Res. for Evolutional Sci. and Technol. (CREST), Japan Sci. and Technol. Agency (JST), c/o AIST, JPN) ,  TAKEUCHI Daisuke (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki ...) ,  TAKEUCHI Daisuke (Core Res. for Evolutional Sci. and Technol. (CREST), Japan Sci. and Technol. Agency (JST), c/o AIST, JPN) ,  YAMASAKI Satoshi (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki ...) ,  YAMASAKI Satoshi (Core Res. for Evolutional Sci. and Technol. (CREST), Japan Sci. and Technol. Agency (JST), c/o AIST, JPN) ,  OKUSHI Hideyo (Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki ...) ,  OKUSHI Hideyo (Core Res. for Evolutional Sci. and Technol. (CREST), Japan Sci. and Technol. Agency (JST), c/o AIST, JPN)
Material： Journal of Crystal Growth  (J Cryst Growth)
Volume： 293  Issue： 2  Page： 311-317  Publication year： Aug. 01, 2006 
JST Material Number： B0942A  ISSN： 0022-0248  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： Diamond ,...
Semi thesaurus term： CVD

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JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (3)： ダイアモンド ,  水素プラズマ ,  エッチング