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J-GLOBAL ID：200902269637543700
Reference number：07A0478775
Composition Dependence of Work Function in Metal (Ni,Pt)-Germanide Gate Electrodes
金属(Ni,Pt)-ゲルマニドによって構成されるゲート電極における仕事関数の組成依存性
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Author (7)：
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Material：
Volume：
46
Issue：
4B
Page：
1865-1869
Publication year：
Apr. 30, 2007
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Transistors
Reference (23)：
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J. Kedzierski, D. Boyd, P. Ronsheim, S. Zafar, J. Newbury, J. Ott, C. Cabral Jr., M. Ieong, and W. Haensch: IEDM Tech. Dig., 2003, p. 315.
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J. A. Kittl, A. Veloso, A. Lauwers, K. G. Anil, C. Demeurisse, S. Kubicek, M. Niwa, M. J. H. van Dal, O. Richard, M. A. Pawlak, M. Jurczak, C. Vrancken, T. Chiarella, S. Brus, K. Maex, and S. Biesemans: Dig. Symp. VLSI Technology, 2005, p. 72.
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K. Takahashi, K. Manabe, T. Ikarashi, N. Ikarashi, T. Hase, T. Yoshihara, H. Watanabe, T. Tatsumi, and Y. Mochizuki: IEDM Tech. Dig., 2004, p. 91.
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M. Kadoshima, T. Nabatame, K. Iwamoto, N. Mise, H. Ota, A. Ogawa, M. Takahashi, M. Ikeda, H. Satake, and A. Toriumi: Jpn. J. Appl. Phys.45(2006)6225.
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E. Cartier, V. Narayanan, E. P. Gusev, P. Jamison, B. Linder, M. Steen, K. K. Chan, M. Frank, N. Bojarczuk, M. Copel, S. A. Cohen, S. Zafar, A. Callegari, M. Gribelyuk, M. P. Chudzik, C. Cabral Jr., R. Carruthers, C. D’Emic, J. Newbury, D. Lacey, S. Guha, and R. Jammy: Dig. Symp. VLSI Technology, 2004, p. 44.
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