Art

J-GLOBAL ID：200902274946698770   Reference number：05A0990843

Improvement of the thickness distribution of a quartz crystal wafer by numerically controlled plasma chemical vaporization machining

数値制御したプラズマ化学蒸発マシニングよる水晶結晶ウエハの厚み分布の向上

Author (6)： SHIBAHARA Masafumi (Dep. of Product Innovation, Hyogo Prefectural Inst. of Technol., 3-1-12 Yukihira-cho, Suma-ku, Kobe, Hyogo 654-0037, JPN) ,  YAMAMURA Kazuya (Res. Center for Ultra-Precision Sci. and Technol. Graduate School of Engineering, Osaka Univ., 2-1 Yamada-oka, Suita ...) ,  SANO Yasuhisa (Dep. of Precision Sci. and Technol. Graduate School of Engineering, Osaka Univ., 2-1 Yamada-oka, Suita, Osaka ...) ,  SUGIYAMA Tsuyoshi (Dep. of Precision Sci. and Technol. Graduate School of Engineering, Osaka Univ., 2-1 Yamada-oka, Suita, Osaka ...) ,  ENDO Katsuyoshi (Res. Center for Ultra-Precision Sci. and Technol. Graduate School of Engineering, Osaka Univ., 2-1 Yamada-oka, Suita ...) ,  MORI Yuzo (Res. Center for Ultra-Precision Sci. and Technol. Graduate School of Engineering, Osaka Univ., 2-1 Yamada-oka, Suita ...)
Material： Review of Scientific Instruments  (Rev Sci Instrum)
Volume： 76  Issue： 9  Page： 096103-096103-4  Publication year： Sep. 2005 
JST Material Number： D0517A  ISSN： 0034-6748  CODEN： RSINAK  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： computing control ,...
Semi thesaurus term： *plasma treatment

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JST classification (2)： Manufacturing technology of solid-state devices  (NC03030V) ,  Applications of plasma  (BJ02110K)

Terms in the title (8)： 数値制御 ,  プラズマ化学 ,  蒸発 ,  マシニング ,  水晶 ,  結晶 ,  ウエハ ,  厚み分布