About SIEMERS M.
About Fraunhofer Inst. Surface Engineering and Thin Films(IST), Braunschweig, DEU
About PFLUG A.
About Fraunhofer Inst. Surface Engineering and Thin Films(IST), Braunschweig, DEU
About SZYSZKA B.
About Fraunhofer Inst. Surface Engineering and Thin Films(IST), Braunschweig, DEU
About Proceedings of the Annual Technical Conference. Society of Vacuum Coaters
About magnetron sputtering
About target
About erosion corrosion
About Monte Carlo method
About computer simulation
About plasma simulation
About parallel arithmetic
About plasma density
About magnetic field configuration
About plasma interaction
About erosion
About Techniques and equipment of thin film deposition
About Solid-plasma interactions
About マグネトロンスパッタリング
About ターゲット
About エロージョン
About モンテカルロ
About 粒子シミュレーション
About 解析