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J-GLOBAL ID:200902283076511555   Reference number:04A0206140

Formation of Carbon Nano-flakes by RF Magnetron Sputtering Method

スパッタリング法によるカーボンナノフレークの形成
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Volume: 47  Issue:Page: 82-86  Publication year: Feb. 20, 2004 
JST Material Number: G0194A  ISSN: 0559-8516  CODEN: SHINA  Document type: Article
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Thin films of other inorganic compounds 
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