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J-GLOBAL ID:200902283314572550   Reference number:09A0123387

Development of Rotating Box Type Multi-Facing Target Sputtering System for a Multi-layered Structure Device

多層構造デバイス用の回転ボックス型多元対向ターゲットスパッタリング装置の開発
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Volume: 33  Issue:Page: 861-864  Publication year: Dec. 2008 
JST Material Number: L4468A  ISSN: 1382-3469  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices  ,  Techniques and equipment of thin film deposition  ,  Other superconducting applications 
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