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J-GLOBAL ID:200902284302849137   Reference number:07A0204326

A New Model with Feedback Structure for Thermal Process and its Application to Decoupling Control

熱系のフィードバック型モデルと非干渉制御への応用
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Volume: 127  Issue:Page: 373-379  Publication year: Mar. 01, 2007 
JST Material Number: S0810A  ISSN: 0385-4221  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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System design and analysis 
Reference (15):
  • KAILATH, T. Control for Advanced Semiconductor Device Manufacturing : A Case History, Control System Applications. 1999
  • ASTROM, K. J. Advanced PID Control, ISA-The Instrumentation. 2005
  • ASTROM, K. J. PID Controllers : Theory, Design and Tuning. 1995
  • SEBORG, D. E. Process Dynamics and Control. 2004
  • 須田信英. PID制御. 1992
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