About MORITA Hiroshi
About National Inst. Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN
About DOI Masao
About Univ. Tokyo, Tokyo, JPN
About Proceedings of SPIE
About photolithography
About surface roughness
About photoresist
About circuit pattern generation
About semiconductor process
About polymer chain
About dissipative system
About dynamics
About particle
About computer simulation
About modeling
About interface(surface)
About line-edge roughness
About dissipative particle dynamics
About solid-solid interface
About Manufacturing technology of solid-state devices
About ラインエッジ粗さ
About 形成過程
About 分子動力学
About 尺度
About シミュレーション