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J-GLOBAL ID:200902286066964542   Reference number:03A0659294

Si基板上でのエピタキシャル強誘電体薄膜の配向制御法の確立

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Material:
Volume: 64th  Issue:Page: 505  Publication year: Aug. 30, 2003 
JST Material Number: Y0055A  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Oxide thin films  ,  Ferroelectrics,antiferroelectrics and ferroelasticity 
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