Rchr
J-GLOBAL ID:200901077995207576   Update date: Sep. 06, 2021

Horita Susumu

ホリタ ススム | Horita Susumu
Affiliation and department:
Job title: Associate Professor
Homepage URL  (1): http://www.jaist.ac.jp/ms/labs/handoutai/horita-lab/horita.html
Research field  (2): Electronic devices and equipment ,  Electric/electronic material engineering
Research keywords  (16): シリコーンオイル ,  オゾン ,  低温Si酸化膜作製 ,  スパッタリング ,  TFT ,  thin film transistor ,  crystallization of Si film ,  強誘電体薄膜 ,  ferroelectric memory ,  Si薄膜 ,  薄膜作製 ,  薄膜結晶成長 ,  半導体工学 ,  電子デバイス ,  silicon oxide film ,  laser anneal
Research theme for competitive and other funds  (8):
  • 2004 - シリコーンオイルとオゾンガスを用いた低温シリコン酸化膜の形成
  • 2003 - Formation of Si oxide film by using ozone and silicone oil at lower temperature less than 200°C
  • 2000 - Si基板上への不揮発・非破壊読出し強誘電体メモリの作製
  • 1999 - Fabrication of low temperature poly-crystal Si film with controlled grain boundary location by a pulse laser beam on a glass substrate
  • 1998 - Low temperature crystallization of a depositing Si film on a glass substrate covered with a poly-YSZ seed layer
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Papers (105):
MISC (2):
Patents (3):
  • 非破壊読出し可能な強誘電体メモリデバイス
  • 導電体薄膜の堆積法
  • 半導体装置の製造及び被処理物処理方法
Books (3):
  • 薄膜作製応用ハンドブック
    エヌ・ティー・エス 2020 ISBN:9784860436315
  • 薄膜ハンドブック(第2版)、4・3 誘電特性4・3・1 誘電体薄膜の性質(2)強誘電性
    オーム社 2008
  • 薄膜トランジスタ 、1章(分担)
    コロナ社 2008
Lectures and oral presentations  (114):
  • Study on Deposition Mechanism of SiOx Films Produced by Silicone Oil and Ozone Gas
    (2020)
  • Deposition of Crystallized Yttria Stabilized Zirconia (YSZ) Films on Cellulose Nanopaper (CNP) Substrates at Low Temperature by Reactive Sputtering
    (2020)
  • Mechanism Study on Deposition of SiOx Films Produced by Silicone Oil and Ozone Gas
    (The 27th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD ’20) P-5, pp. 79 - 82. 2020)
  • Deposition Condition at Low Temperature for Crystallization Enhancement of YSZ Films on Glass Substrates by Reactive Sputtering
    (The 27th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FP ’20) P-8, pp. 85 - 88.D ’20) 2020)
  • Deposition Condition for High Crystalline Fraction of Yttria-Stabilized Zirconia (YSZ) Films Deposited by Reactive Sputtering at Room Temperature
    (2020)
more...
Works (2):
  • 研究成果活用プラザ石川実用化検討に係る試験研究事業(JST)
    2003 -
  • 研究成果活用プラザ石川実用化検討に係る試験研究事業(JST)
    2002 -
Professional career (1):
  • Dr.Eng. in Applied Electronics, Tokyo Institute of Technology(1987)
Work history (2):
  • 1988 - Recturer (1988), Associate Professor (1992) at Kanazawa University
  • 1987 - Kanazawa University Faculty of Engineering
Committee career (6):
  • 電子情報通信学会 一般会員
  • 日本表面学会 一般会員
  • 応用物理学会 一般会員
  • Institute of Electronics Information and Communication Engineers in Japan Member
  • Surface Science Society of Japan Member
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Awards (5):
  • 2017/04 - 応用物理学会 第15回APEX/JJAP編集貢献賞
  • 2015/11 - 独立行政法人日本学術振興会 科研費審査委員賞
  • 2013/12 - The 20th International Display Workshops (IDW'13) Outstanding Poster Paper Award
  • 2012/04 - 応用物理学会 第10回APEX/JJAP編集貢献賞
  • 2003/12/03 - 10th International Display Workshops Outstanding Poster Paper Award
Association Membership(s) (8):
MRS (Materials Research Society) ,  電子情報通信学会 ,  日本表面学会 ,  応用物理学会 ,  MRS (Materials Research Society) in U.S.A. ,  Institute of Electronics Information and Communication Engineers in Japan ,  Surface Science Society of Japan ,  Japan Society of Applied Physics
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