Art
J-GLOBAL ID：200902286510215608   Reference number：07A0237183

An Ultrasonically Levitated Noncontact Stage Using Traveling Vibrations on Precision Ceramic Guide Rails

精密セラミックガイドレール上の進行振動を用いた超音波浮上非接触台
Author (5)：
KOYAMA DAISUKE

About KOYAMA DAISUKE

(Tokyo Inst. Technol., Yokohama, JPN)

About Tokyo Inst. Technol., Yokohama, JPN

, 
IDE TAKESHI

About IDE TAKESHI

(Tokyo Inst. Technol., Yokohama, JPN)

About Tokyo Inst. Technol., Yokohama, JPN

, 
FRIEND JAMES R.

About FRIEND JAMES R.

(Tokyo Inst. Technol., Yokohama, JPN)

About Tokyo Inst. Technol., Yokohama, JPN

, 
NAKAMURA KENTARO

About NAKAMURA KENTARO

(Tokyo Inst. Technol., Yokohama, JPN)

About Tokyo Inst. Technol., Yokohama, JPN

, 
UEHA SADAYUKI

About UEHA SADAYUKI

(Tokyo Inst. Technol., Yokohama, JPN)

About Tokyo Inst. Technol., Yokohama, JPN


Material：
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control  (IEEE Trans Ultrason Ferroelectr Freq Control)

About IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control


Volume： 54  Issue： 3  Page： 597-604  Publication year： Mar. 2007 
JST Material Number： H0369A  ISSN： 0885-3010  CODEN： ITUCER  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*flotation method

About flotation method

,...
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*超音波浮上

About 超音波浮上

,...
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JST classification
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Other applications of acoustics 
(BB03100I)

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Terms in the title (3)：
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超音波

About 超音波

, 
浮上

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, 
非接触

About 非接触


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