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J-GLOBAL ID:200902286768288162   Reference number:06A0677539

Room-Temperature Microfluidics Packaging Using Sequential Plasma Activation Process

逐次プラズマ活性化プロセスを用いる室温微小流体素子パッケージング
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Volume: 29  Issue:Page: 448-456  Publication year: Aug. 2006 
JST Material Number: W0590A  ISSN: 1521-3323  CODEN: ITAPFZ  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices  ,  Fluidic control equipment 
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