Art
J-GLOBAL ID：200902287664717718   Reference number：05A0991119

Effect of blade-surface-roughness on the pumping performance of a turbomolecular pump

ターボ分子ポンプのポンピング性能に対するブレード表面ラフネスの影響
Author (4)：
SAWADA T.

About SAWADA T.

(Akita Study Center, The Univ. of the Air, Akita 010-8502, JPN)

About Akita Study Center, The Univ. of the Air, Akita 010-8502, JPN

, 
YABUKI M.

About YABUKI M.

(Dep. of Mechanical Engineering, Tsuruoka National Coll. of Technol., Tsuruoka 997-8511, JPN)

About Dep. of Mechanical Engineering, Tsuruoka National Coll. of Technol., Tsuruoka 997-8511, JPN

, 
SUGIYAMA W.

About SUGIYAMA W.

(Dep. of Mechanical Engineering, Fac. of Engineering and Resource Sci., Akita Univ., Akita 010-8502, JPN)

About Dep. of Mechanical Engineering, Fac. of Engineering and Resource Sci., Akita Univ., Akita 010-8502, JPN

, 
WATANABE M.

About WATANABE M.

(Engineering Div., Hachi-ohji Factory, Osaka Vacuum Ltd., Hachi-ohji 193-0942, JPN)

About Engineering Div., Hachi-ohji Factory, Osaka Vacuum Ltd., Hachi-ohji 193-0942, JPN


Material：
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)

About Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films


Volume： 23  Issue： 6  Page： 1538-1544  Publication year： Nov. 2005 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*molecular pump

About molecular pump

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
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turbo molecular pump

About turbo molecular pump


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Vacuum production and techniques 
(BA02020L)

About Vacuum production and techniques

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
ターボ分子ポンプ

About ターボ分子ポンプ

, 
ポンピング

About ポンピング

, 
ブレード

About ブレード

, 
表面ラフネス

About 表面ラフネス


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