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J-GLOBAL ID：200902287867810012   Reference number：05A1038297

Spectroscopic Ellipsometrical Analysis of Anodized Film Formed on Titanium in 0.1 M H₂SO₄ Solution

0.1M H₂SO₄溶液中でチタン上に生成した陽極酸化膜の分光エリプソメトリ解析

Author (6)： NANJO Hiroshi (RC-CCP, National Inst. of Advanced Industrial Sci. and Technol. (AIST), JPN) ,  YAO Yuhong (RC-CCP, National Inst. of Advanced Industrial Sci. and Technol. (AIST), JPN) ,  XIA Zhengbin (RC-CCP, National Inst. of Advanced Industrial Sci. and Technol. (AIST), JPN) ,  NISHIOKA Masateru (RC-CCP, National Inst. of Advanced Industrial Sci. and Technol. (AIST), JPN) ,  HIEJIMA Yusuke (RC-CCP, National Inst. of Advanced Industrial Sci. and Technol. (AIST), JPN) ,  KANAKUBO Mitsuhiro (RC-CCP, National Inst. of Advanced Industrial Sci. and Technol. (AIST), JPN)
Material： e-Journal of Surface Science and Nanotechnology (Web)  (表面科学とナノテクノロジー)
Volume： 3  Page： 345-349 (J-STAGE)  Publication year： 2005 
JST Material Number： U0016A  ISSN： 1348-0391  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *ellipsometry ,...
Semi thesaurus term： *anodic oxidation

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JST classification (2)： Electrochemical polarization  (CB07030J) ,  Oxide thin films  (BK14050P)

Reference (15)：

• [1] B. Karunagaran, K. Kim, D. Mangalaraj, J. Yi, S. Velumani, Sol. Energ. Mat. Sol. C. 88, 199 (2005).
• [2] J. P. Lu, J. Wang, R. Raj, Thin Solid Films 204, L13 (1991).
• [3] J. M. Bennett, E. Pelletier, G. Albrand, J. P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther, A. Saxer, Appl. Opt. 28, 3303 (1989).
• [4] L. J. Meng, M. P. D. Santos, Thin Solid Films 226, 22 (1993).
• [5] Y. Leprince-Wang, K. Yu-Zhang, V. N. Van, D. Souche, J. Rivory, Thin Solid Films 307, 38 (1997).

Terms in the title (6)： H2SO4 ,  溶液 ,  チタン ,  陽極酸化膜 ,  分光エリプソメトリ ,  解析