Art
J-GLOBAL ID：200902290760212067   Reference number：04A0021016

Structure and properties of Cr-B, Cr-B-N and multilayer Cr-B/Cr-B-N thin films prepared by r.f.-sputtering

rfスパッタリングにより形成したCr-B,Cr-B-Nおよび多層Cr-B/Cr-B-N薄膜の組織および性質
Author (6)：
SAKAMOTO Y

About SAKAMOTO Y

(Toyama National Coll. of Technol., Toyama, JPN)

About Toyama National Coll. of Technol., Toyama, JPN

, 
NOSE M

About NOSE M

(Takaoka National Coll., Takaoka, JPN)

About Takaoka National Coll., Takaoka, JPN

, 
MAE T

About MAE T

(Toyama National Coll. of Technol., Toyama, JPN)

About Toyama National Coll. of Technol., Toyama, JPN

, 
HONBO E

About HONBO E

(Toyama Industrial Res. Center, Takaoka, JPN)

About Toyama Industrial Res. Center, Takaoka, JPN

, 
ZHOU M

About ZHOU M

(Osaka Univ., Mihogaoka, JPN)

About Osaka Univ., Mihogaoka, JPN

, 
NOGI K

About NOGI K

(Osaka Univ., Mihogaoka, JPN)

About Osaka Univ., Mihogaoka, JPN


Material：
Surface & Coatings Technology  (Surf Coat Technol)

About Surface & Coatings Technology


Volume： 174/175  Page： 444-449  Publication year： Sep. 2003 
JST Material Number： D0205C  ISSN： 0257-8972  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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silicon

About silicon

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
microstructure

About microstructure


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Ceramic coating to nonmetallic materials 
(YC02040K)

About Ceramic coating to nonmetallic materials

,  Mechanical properties 
(WB02030U)

About Mechanical properties

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
RFスパッタリング

About RFスパッタリング

, 
Cr

About Cr

, 
多層

About 多層

, 
薄膜

About 薄膜

, 
組織

About 組織

, 
性質

About 性質


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