Pressure Distribution and Pumping Delay Time in Short-Spacing Parallel Planes

SAITO Yoshio; SATO Y.; MATUDA Namio

Art

J-GLOBAL ID：200902292406609378 Reference number：07A0574439

Pressure Distribution and Pumping Delay Time in Short-Spacing Parallel Planes

短い間隔の平行板内の圧力分布と排気遅れ

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Material：
Volume： 50 Issue： 5 Page： 366-370 Publication year： May. 20, 2007
JST Material Number： G0194A ISSN： 0559-8516 CODEN： SHINA Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Vacuum production and techniques , Display equipment

Reference (5)：

MATUDA, N. On the Relation between the Impact Density Distribution and the Transmission Probability of Free Molecular. J. Vac. Soc. Jpn. 2004, 47, 690-695
CLAUSING, P. The flow of highly rarefied gases through tubes of arbitrary length. Ann. Physik. 1932, 12, 961-971
RFRDH1 in libmathlib. a at CERNLIB. http://wwwasdoc.web.cern.ch/wwwasdoc/shortwrupsdir/d601/top.html
SAITO, Y. Outgassing measurement of stacked laminations for use as an electromagnet core. J. Vac. Sci. Technol., A. 2004, 22, 2206-2211
TUZI, Y. Effect of surface treatment on the adsorption kinetics of water vapor in a vacuum chamber. Vacuum. 1996, 47, 705-708

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