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J-GLOBAL ID:200902292406609378   Reference number:07A0574439

Pressure Distribution and Pumping Delay Time in Short-Spacing Parallel Planes

短い間隔の平行板内の圧力分布と排気遅れ
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Volume: 50  Issue:Page: 366-370  Publication year: May. 20, 2007 
JST Material Number: G0194A  ISSN: 0559-8516  CODEN: SHINA  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Vacuum production and techniques  ,  Display equipment 
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