Development of Silicon Micro Multi-edged Tool Using Anisotropic Etching (2nd Report)-Evaluation of Machining Performance for the Micro Tool and Manufacturing of Prototype Milli-sized Cutting Device-

YAMAGUCHI TOMOMI; HIGUCHI MASAHIRO; SHIMADA SHOICHI; NISHIZAWA AKIYUKI

Art

J-GLOBAL ID：200902293113815875 Reference number：05A1019122

Development of Silicon Micro Multi-edged Tool Using Anisotropic Etching (2nd Report)-Evaluation of Machining Performance for the Micro Tool and Manufacturing of Prototype Milli-sized Cutting Device-

異方性エッチングによるシリコンマイクロ多刃工具の開発(第2報)-切削性能評価とミリ加工機の試作-

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Material：
Volume： 70 Issue： 10 Page： 1276-1280 Publication year： Oct. 05, 2004
JST Material Number： F0268A ISSN： 0912-0289 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Cutting in general

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