Electron induced nanodeposition of tungsten using field emission scanning and transmission electron microscopes

SHIMOJO M; MITSUISHI K; TAMEIKE A; FURUYA K

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J-GLOBAL ID：200902298338672471 Reference number：04A0365141

Electron induced nanodeposition of tungsten using field emission scanning and transmission electron microscopes

電界放出走査型及び透過型電子顕微鏡を用いたタングステンの電子誘起ナノ堆積

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Material：
Volume： 22 Issue： 2 Page： 742-746 Publication year： Mar. 2004
JST Material Number： E0974A ISSN： 1071-1023 CODEN： JVTBD9 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Metallic thin films , Manufacturing technology of solid-state devices

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