PSM

電子素子
Synonyms (3)：

phase shift mask (PSM【フォトマスク】)
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phase shifting masks (フェーズシフトマスク)
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phase shifting masks (位相反転マスク)
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Related terms (3)：

photolithography (フォトリソグラフィー)
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- Search "photolithography"
- Detailed information
phase shift (位相シフト)
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- Search "phase shift"
- Detailed information
superresolution (超解像)
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- Search "superresolution"
- Detailed information

Broader terms (1)：

Thsaurus map：

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