Term

J-GLOBAL ID：200906045741908018

attenuated phase shift mask

電子素子
Synonyms (3)：

attenuated phase shift mask (減衰PSM)
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halftone phase shift mask (ハーフトーン位相シフトマスク)
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halftone phase shift mask (ハーフトーンPSM)
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Related terms (4)：

halftone image (ハーフトーン画像)
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- Detailed information
photolithography (フォトリソグラフィー)
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phase shift (位相シフト)
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- Detailed information
superresolution (超解像)
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- Detailed information

Broader terms (1)：

photomask (フォトマスク)
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- Search "photomask"
- Detailed information

Thsaurus map：

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