Art

J-GLOBAL ID：201002244881342021   Reference number：10A0288218

Silicon Fishbone-Shaped MEMS Resonator with Digitally Variable Resonant-Frequency Tuning

ディジタル可変共振周波数同調をもつシリコン魚骨型MEMS共振器

Author (3)： TANIGAWA Hiroshi (Ritsumeikan Univ., JPN) ,  MAKITA Sho (Ritsumeikan Univ., Shiga, JPN) ,  SUZUKI Kenichiro (Ritsumeikan Univ., Shiga, JPN)
Material： IEEJ Transactions on Electrical and Electronic Engineering  (IEEJ Trans Electr Electron Eng)
Volume： 5  Issue： 2  Page： 164-170  Publication year： Mar. 2010 
JST Material Number： W1854A  ISSN： 1931-4973  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： variability ,  resonance frequency ,  tuning ,  silicon ,  *MEMS ,  *resonator ,  frequency band ,  multi-band
Semi thesaurus term： frequency tuning

JST classification (2)： Resonator  (NC04050Y) ,  General  (NC03161C)

Reference (12)：

• NGUYEN, CT-C. MEMS technology for timing and frequency control. IEEE Transactions on Ultrasonic, Ferroelectrics, and Frequency Control. 2007, 54, 2, 251-270
• WANG, K. VHF free-free beam high-Q micromechanical resonators. Journal of Microeletromechanical Systems. 2000, 9, 3, 347-360
• CLARK, JR. High-Q UHF micromechanical radial-contour mode disk resonators. Journal of Microeletromechanical Systems. 2005, 14, 6, 1298-1310
• KAAJAKARI, V. Square-extension mode single-crystal silicon micromechanical RF-resonator. Digest of the 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, 2003. 2003, 951-954
• MAKITA, S. Silicon fishbone-shaped resonant-frequency-tunable MEMS resonator. Digest of 2007 International Microprocesses and Nanotechnology Conference, Kyoto. 2007, 500-501

Terms in the title (6)： ディジタル ,  可変 ,  共振周波数 ,  同調 ,  シリコン ,  MEMS共振器