Art
J-GLOBAL ID：201002256477355673   Reference number：10A1542862

Piezoresistive effect in the three-dimensional diamondlike carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition

集束イオンビーム化学蒸着により作成した3次元ダイヤモンド型炭素ナノ構造の圧抵抗効果
Author (4)：
KOMETANI Reo

About KOMETANI Reo

(Graduate School of Engineering, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, JPN)

About Graduate School of Engineering, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, JPN

, 
YUSA Kouki

About YUSA Kouki

(Graduate School of Engineering, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, JPN)

About Graduate School of Engineering, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, JPN

, 
WARISAWA Shin'ichi

About WARISAWA Shin'ichi

(Graduate School of Engineering, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, JPN)

About Graduate School of Engineering, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, JPN

, 
ISHIHARA Sunao

About ISHIHARA Sunao

(Graduate School of Engineering, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, JPN)

About Graduate School of Engineering, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, JPN


Material：
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena  (Journal of Vacuum Science & Technology. B. Nanotechnology & Microelectronics: Materials, Processing, Measurement, & Phenomena)

About Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena


Volume： 28  Issue： 6  Page： C6F38  Publication year： Nov. 2010 
JST Material Number： E0974A  ISSN： 2166-2746  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*DLC film

About DLC film

, 
*nanostructure

About nanostructure

, 
focused ion beam

About focused ion beam

, 
ion beam deposition

About ion beam deposition

, 
chemical vapor deposition

About chemical vapor deposition

, 
cantilever beam

About cantilever beam

, 
Gallium

About Gallium

, 
*piezoresistance effect

About piezoresistance effect

, 
heat treatment

About heat treatment

, 
current-voltage characteristic

About current-voltage characteristic


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*microcantilever

About microcantilever


JST classification (2)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Electric conduction in other inorganic compounds 
(BM03044O)

About Electric conduction in other inorganic compounds

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
集束イオンビーム化学蒸着

About 集束イオンビーム化学蒸着

, 
3次元

About 3次元

, 
ダイヤモンド

About ダイヤモンド

, 
炭素

About 炭素

, 
ナノ構造

About ナノ構造

, 
圧抵抗効果

About 圧抵抗効果


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