Art

J-GLOBAL ID：201002266220239503   Reference number：10A0950403

Excimer Laser 3D Machining Based on Irradiation Pulse Number Control

照射パルス数制御に基づくエキシマレーザー3次元機械加工

Author (4)： TANAKA Tomohisa (Dept. Mechanical and Control Engineering, Tokyo Inst. of Technol.) ,  SUZUKI Ryo (Production Engineering Dep., Denso Corp.) ,  ZHU Jiang (Dept. Mechanical and Control Engineering, Tokyo Inst. of Technol.) ,  SAITO Yoshio (Dept. Mechanical and Control Engineering, Tokyo Inst. of Technol.)
Material： Journal of Advanced Mechanical Design, Systems, and Manufacturing (Web)  (J Adv Mech Des Syst Manuf (Web))
Volume： 4  Issue： 5  Page： 1033-1043 (J-STAGE)  Publication year： 2010 
JST Material Number： U0027A  ISSN： 1881-3054  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： machining ,  *three dimension ,  excimer laser ,  *laser ablation ,  laser pulse ,  number (mathematics) ,  depth ,  *KrF laser
Semi thesaurus term： *KrF excimer laser ,  パルス数 ,  加工深さ ,  *mechanical working

JST classification (1)： Special machining  (QC04000Y)

Reference (6)：

• (1) The Institute of Electrical Engineers of Japan Ed., Laser Ablation and Applications (in Japanese), (1999), pp.145-152, The Institute of Electrical Engineers of Japan.
• (2) Sugaya,K., Tanaka,T. and Saito,Y., Three dimensional form generation of polymer by eximer laser processing, Proceedings of the Spring Meeting of Japan Society of Precision Engineering, (2006), pp.1231-1232.
• (3) Yoshii,K., Nishizono,T., et.al, Study on machining of micro 3-diemensional shape by using ultra-violet pulse laser (in Japanese), Proceedings of the Spring Meeting of Japan Society of Precision Engineering, (2002), p.393.
• (4) Senba,T., Yamaguchi,T. and Amamoto,Y., Three-Dimensional Microfabrication System Using Focused Fiber Laser Beam, Proceedings of the 4th International Conference on Leading Edge Manufacturing in 21th Century, No.07-205 (2007-Nov.), pp.843-848.
• (5) Choi,K.H., Meijer,J., Masuzawa,T. and Kim,D.H., Excimer laser micromachining for 3D microstructure, Journal of Materials Processing Technology, 149 (2004), pp.561-566.

Terms in the title (4)： パルス数 ,  エキシマレーザー ,  3次元 ,  機械加工