Art

J-GLOBAL ID：201002269837992682   Reference number：10A0640405

Modeling of radiative properties of Sn plasmas for extreme-ultraviolet source

極端紫外源のためのスズプラズマの放射特性のモデリング

Author (9)： SASAKI Akira (Quantum Beam Sci. Directorate, Japan Atomic Energy Agency, 8-1 Umemidai, Kizugawa-shi, Kyoto 619-0215, JPN) ,  SUNAHARA Atsushi (Inst. for Laser Technol., 1-8-4 Utsubohonmachi, Nishi-ku, Osaka 550-0004, JPN) ,  FURUKAWA Hiroyuki (Inst. for Laser Technol., 1-8-4 Utsubohonmachi, Nishi-ku, Osaka 550-0004, JPN) ,  NISHIHARA Katsunobu (Inst. of Laser Engineering, Osaka Univ., 2-6 Yamadaoka, Suita, Osaka 565-0871, JPN) ,  FUJIOKA Shinsuke (Inst. of Laser Engineering, Osaka Univ., 2-6 Yamadaoka, Suita, Osaka 565-0871, JPN) ,  NISHIKAWA Takeshi (Dep. of Electrical and Electronic Engineering, Okayama Univ., 1-1 Naka 1-chome, Tsushima, Okayama 700-8530, JPN) ,  KOIKE Fumihiro (Physics Lab., School of Medicine, Kitasato Univ., 1-15-1 Kitasato, Sagamihara, Kanagawa 228-8555, JPN) ,  OHASHI Hayato (Dep. of Physics, Tokyo Metropolitan Univ., 1-1 Minami-Osawa, Hachioji, Tokyo 192-0397, JPN) ,  TANUMA Hajime (Dep. of Physics, Tokyo Metropolitan Univ., 1-1 Minami-Osawa, Hachioji, Tokyo 192-0397, JPN)
Material： Journal of Applied Physics  (Journal of General Physics and its Application to Other Sciences and to Industry)
Volume： 107  Issue： 11  Page： 113303  Publication year： Jun. 01, 2010 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIAU  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *ultraviolet source ,  *extreme ultraviolet ,  *plasma ,  tin ,  Electromagnetic Radiation ,  modeling ,  lithography ,  atomic data ,  computer code ,  excited state ,  satellite line ,  resonance ,  energy conversion efficiency ,  emission spectrum ,  wavelength ,  correction (compensation) ,  ion density ,  transparency ,  electron temperature ,  opacity

JST classification (2)： Light sources,lighting apparatus  (NB12020F) ,  Plasma in general  (BJ02010B)

Terms in the title (5)： 極端紫外 ,  スズ ,  プラズマ ,  放射特性 ,  モデリング