Art
J-GLOBAL ID:201002279049969888   Reference number:10A0050767

Development of a Built-in Type Multi-Axis Active Vibration Damping and Isolation Device for Small Precision Devices

小型精密機器のための組込み型多軸アクティブ制振・除振装置の開発
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Material:
Volume: 75  Issue: 760  Page: 3184-3191  Publication year: Dec. 25, 2009 
JST Material Number: F0045B  ISSN: 0387-5024  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Propagation of vibrations 
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