About BRAEUER G.
About Fraunhofer Inst. for Surface Engineering and Thin Films, Bienroder Weg 54 E, D-38108 Braunschweig, DEU
About SZYSZKA B.
About Fraunhofer Inst. for Surface Engineering and Thin Films, Bienroder Weg 54 E, D-38108 Braunschweig, DEU
About VERGOEHL M.
About Fraunhofer Inst. for Surface Engineering and Thin Films, Bienroder Weg 54 E, D-38108 Braunschweig, DEU
About BANDORF R.
About Fraunhofer Inst. for Surface Engineering and Thin Films, Bienroder Weg 54 E, D-38108 Braunschweig, DEU
About Vacuum
About magnetron sputtering
About sputtered deposition
About area
About plasticity
About substrate(plate)
About growth rate
About research and development
About large area
About plasticity
About Techniques and equipment of thin film deposition
About マグネトロンスパッタリング