Art

J-GLOBAL ID：201002286342123019   Reference number：10A0063347

Directional alignment and anisotropic internal stress in Ru/FeCoB films with high anisotropy field

高異方性磁界を有するRu/FeCoB膜の方向性結晶配列と異方的残留応力

Author (2)： NAKAGAWA SHIGEKI (東京工大) ,  HIRATA KEN'ICHIRO (東京工大)
Material： 電気学会マグネティックス研究会資料  (電気学会研究会資料)
Volume： MAG-09  Issue： 168-189  Page： 53-58  Publication year： Dec. 01, 2009 
JST Material Number： Z0924A  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： saturation magnetization ,  frequency characteristic ,  *magnetic anisotropy ,  anisotropic magnetic field ,  *residual stress ,  crystal orientation ,  sequence and arrangement ,  *iron base alloy ,  *cobalt base alloy ,  *boron containing alloy ,  *Ruthenium ,  alignment ,  ferromagnetic resonance ,  *multilayer film ,  X-Ray Diffraction ,  *bilayer
Semi thesaurus term： *bilayer film

JST classification (3)： Magnetic domain and magnetization process in general  (BM06111M) ,  Magnetic anisotropy and magnetomechanical effects of metals  (BM06102S) ,  Magnetic materials  (NA04040H)

Reference (7)：

• E. van de Riet and F. Roozeboom: “Ferromagnetic resonance and eddy currents in high-permeable thin films”, J. Appl. Phys., Vol.81, No.1.1 Jan, p350.(1997)
• Christopher L. Platt, M. K. Minor, and Timothy J. Klemmer: “Magnetic and Structural Properties of FeCoB Thin films”, IEEE Trans. Magn., Vol.37, No.4, July, pp2302.(2001)
• K. Hirata, A. Hashimoto, T. Matsuu and S. Nakagawa: “Ru underlayers for enhancement of in-plane magnetic anisotropy field of Ru/FeCoB film”, Material Science and Engineering B, Vol.161, pp. 134(2009)
• M. Naoe, S. Yamanaka, Y. Hoshi: “Facing targets type of sputtering method for deposition of magnetic metal films at low temperature and high rate”, IEEE Trans. Magn., Vol. MAG-16, No.5, pp. 646(1980)
• K. Tanaka, K. Suzuki, Y, Akiniwa: Evaluation of Residual Stresses by X-Ray Diffraction-Fundamentals and Applications-, p 99, Yokendo Ltd. Tokyo, Japan,(2006)

Terms in the title (5)： 異方性磁界 ,  Ru ,  方向性 ,  結晶 ,  残留応力