Term

J-GLOBAL ID：201006064422366062

MF sputtering

物質の構造
Synonyms (4)：

middle-frequency sputtering (中周波スパッタリング)
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mid-frequency sputtering (中周波スパッタリング)
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middle-frequency sputtering (中波スパッタリング)
About middle-frequency sputtering
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mid-frequency sputtering (中波スパッタリング)
About mid-frequency sputtering
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Related terms (2)：

intermediate frequency (中間周波数)
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sputtered deposition (スパッタ蒸着)
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Broader terms (1)：

magnetron sputtering (マグネトロンスパッタリング)
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