Evaluating the performance of DP and EUVL by using analytical equations for resolution of optical lithography with considering required DOF

SHIBUYA Masato; NOGAMI Kouhei; TAKADA Akira; NAKADATE Suezou

Art

J-GLOBAL ID：201102211536069950 Reference number：11A1250093

Evaluating the performance of DP and EUVL by using analytical equations for resolution of optical lithography with considering required DOF

要求DOFの考察による光リソグラフィーの分解能に関する解析方程式を用いることによるDP及びEUVLの性能の評価

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Material：
Volume： 7973 Issue： Pt.2 Page： 79732Y.1-79732Y.9 Publication year： 2011
JST Material Number： D0943A ISSN： 0277-786X CODEN： PSISDG Document type： Proceedings
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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