Art

J-GLOBAL ID：201102212900846450   Reference number：11A0411507

Fourier-Transform Infrared Absorption Spectroscopy of Chromium Nitride Thin Film

窒化クロム薄膜のFourier変換赤外吸収分光

Author (7)： SHIRAHATA Jun (Nagaoka Univ. Technol., Niigata, JPN) ,  OHORI Tetsutaro (Nagaoka Univ. Technol., Niigata, JPN) ,  ASAMI Hiroki (Tomakomai National Coll. Technol., Hokkaido, JPN) ,  SUZUKI Tsuneo (Nagaoka Univ. Technol., Niigata, JPN) ,  NAKAYAMA Tadachika (Nagaoka Univ. Technol., Niigata, JPN) ,  SUEMATSU Hisayuki (Nagaoka Univ. Technol., Niigata, JPN) ,  NIIHARA Koichi (Nagaoka Univ. Technol., Niigata, JPN)
Material： Japanese Journal of Applied Physics  (JJAP)
Volume： 50  Issue： 1,Issue 3  Page： 01BE03.1-01BE03.4  Publication year： Jan. 25, 2011 
JST Material Number： G0520B  ISSN： 0021-4922  CODEN： JJAPB6  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： *chromium compound ,  *nitride ,  *FTIR spectroscopy ,  infrared absorption spectrum ,  *thin film growth ,  Rutherford scattering spectroscopy ,  chemical bond ,  residual stress ,  magnetron sputtering ,  X-ray diffraction ,  ceramics ,  electron microscopy
Semi thesaurus term： *CrN

JST classification (1)： Infrared spectroscopy and spectrometers  (BD07042H)

Reference (15)：

• P. Hones, R. Sanjines, and F. Lévy: Surf. Coat. Technol.94-95(1997)398.
• P. H. Mayrhofer, G. Tischler, and C. Mitter: Surf. Coat. Technol.142-144(2001)78.
• L. Cunha, M. Andritschky, K. Pischow, and Z. Wang: Thin Solid Films 355-356(1999)465.
• R. A. Nyquist and R. O. Kagel: Infrared Spectra of Inorganic Compounds (Academic Press, New York, 1971) p. 116.
• J. Shirahata, T.0hori, H. Asami, T. Suzuki, T. Nakayama, H. Suematsu, Y. Nakajima, and K. Niihara: submitted to Thin Solid Films.

Terms in the title (5)： 窒化クロム ,  薄膜 ,  Fourier変換 ,  赤外吸収 ,  分光