Characterization of Terraces and Steps on Cl-Terminated Ge(111) Surfaces After HCl Treatment in N<sub>2</sub> Ambient

DEI Katsuya; KAWASE Tatsuya; YONEDA Kazufumi; UCHIKOSHI Junichi; MORITA Mizuho; ARIMA Kenta

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J-GLOBAL ID：201102240807618718 Reference number：11A1074484

Characterization of Terraces and Steps on Cl-Terminated Ge(111) Surfaces After HCl Treatment in N₂ Ambient

N₂雰囲気中のHCl処理後のCl終端Ge(111)表面上のテラスとステップの特性化

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Volume： 11 Issue： 4 Page： 2968-2972 Publication year： Apr. 2011
JST Material Number： W1351A ISSN： 1533-4880 CODEN： JNNOAR Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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Characterization of Terraces and Steps on Cl-Terminated Ge(111) Surfaces After HCl Treatment in N2 Ambient

Characterization of Terraces and Steps on Cl-Terminated Ge(111) Surfaces After HCl Treatment in N₂ Ambient