Art
J-GLOBAL ID：201102264454389732   Reference number：11A1208320

Simple and Low Cost Fabrication of High-Sensitive Capacitance Sensors

高感度容量センサの簡単で低コスト製作
Author (7)：
KASAHARA T.

About KASAHARA T.

(Waseda Univ., Tokyo, JPN)

About Waseda Univ., Tokyo, JPN

, 
MIZUSHIMA M.

About MIZUSHIMA M.

(Oga, Inc., Toyama, JPN)

About Oga, Inc., Toyama, JPN

, 
SHINOHARA H.

About SHINOHARA H.

(Waseda Univ., Tokyo, JPN)

About Waseda Univ., Tokyo, JPN

, 
OBATA T.

About OBATA T.

(Toyama Industrial Technol. Center, Toyama, JPN)

About Toyama Industrial Technol. Center, Toyama, JPN

, 
FUTAKUCHI T.

About FUTAKUCHI T.

(Toyama Industrial Technol. Center, Toyama, JPN)

About Toyama Industrial Technol. Center, Toyama, JPN

, 
MIZUNO J.

About MIZUNO J.

(Waseda Univ., Tokyo, JPN)

About Waseda Univ., Tokyo, JPN

, 
SHOJI S.

About SHOJI S.

(Waseda Univ., Tokyo, JPN)

About Waseda Univ., Tokyo, JPN


Material：
International Conference on Electronics Packaging (CD-ROM)  (ICEP (CD-ROM))

About International Conference on Electronics Packaging (CD-ROM)


Volume： 2010  Page： ROMBUNNO.TB5-3  Publication year： May. 12, 2010 
JST Material Number： L6010B  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
sensor

About sensor

, 
*cost reduction

About cost reduction

, 
high sensitivity

About high sensitivity

, 
*pressure sensor

About pressure sensor

, 
polyimide

About polyimide

, 
photocrosslinking

About photocrosslinking

, 
ultraviolet irradiation

About ultraviolet irradiation

, 
activation

About activation


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*UV crosslinking

About UV crosslinking

, 
cost reduction

About cost reduction

, 
surface activation

About surface activation

, 
capacitive sensor

About capacitive sensor


JST classification (2)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of force,work load,pressure,friction 
(AD05050V)

About Measuring methods and instruments of force,work load,pressure,friction

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
高感度

About 高感度

, 
容量センサ

About 容量センサ

, 
製作

About 製作


Return to Previous Page

TOP

BOTTOM