Defect Characterization of 4H-SiC Bulk Crystals Grown on Micropipe Filled Seed Crystals

KATO Tomohisa; KOJIMA Kazutoshi; NISHIZAWA Shin-ichi; ARAI Kazuo

Art

J-GLOBAL ID：201202259128631837 Reference number：12A0153049

Defect Characterization of 4H-SiC Bulk Crystals Grown on Micropipe Filled Seed Crystals

微小パイプ充填種結晶に成長した4H-SiCバルク結晶の欠陥キャラクタリゼーション

Publisher site Copy service {{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=12A0153049&COPY=1") }}
Access JDreamⅢ for advanced search and analysis. {{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=12A0153049&from=J-GLOBAL&jstjournalNo=D0716B") }}

Author (4)： , , ,
Material：
Volume： 483/485 Page： 315-318 Publication year： 2005
JST Material Number： D0716B ISSN： 0255-5476 Document type： Article
Country of issue： Switzerland (CHE) Language： ENGLISH (EN)

, , , , , , ,

Return to Previous Page