Art

J-GLOBAL ID：201202283218881482   Reference number：12A0437209

Low temperature epitaxial growth and characterization of Ga-doped ZnO thin films on Al₂O₃ (0001) substrates prepared with different buffer layers

各種バッファ層を付けたAl₂O₃(0001)基板上のGaドープZnO薄膜の低温エピタキシャル成長及び特性

Author (10)： SHIN Seung Wook (Dep. of Materials Sci. and Engineering, KAIST, Daejeon 305-701, KOR) ,  AGAWANE G.l. (Photonics Technol. Res. Inst., Dep. of Materials Sci. and Engineering, Chonnam National Univ., 300 Yongbong-Dong ...) ,  KIM In Young (Photonics Technol. Res. Inst., Dep. of Materials Sci. and Engineering, Chonnam National Univ., 300 Yongbong-Dong ...) ,  KWON Ye Bin (Photonics Technol. Res. Inst., Dep. of Materials Sci. and Engineering, Chonnam National Univ., 300 Yongbong-Dong ...) ,  JUNG In Ok (Photonics Technol. Res. Inst., Dep. of Materials Sci. and Engineering, Chonnam National Univ., 300 Yongbong-Dong ...) ,  GANG Myeng Gil (Photonics Technol. Res. Inst., Dep. of Materials Sci. and Engineering, Chonnam National Univ., 300 Yongbong-Dong ...) ,  MOHOLKAR A.v. (Dep. of Physics, Shivaji Univ., Kolhapur 416-004, IND) ,  MOON Jong-ha (Photonics Technol. Res. Inst., Dep. of Materials Sci. and Engineering, Chonnam National Univ., 300 Yongbong-Dong ...) ,  KIM Jin Hyeok (Photonics Technol. Res. Inst., Dep. of Materials Sci. and Engineering, Chonnam National Univ., 300 Yongbong-Dong ...) ,  LEE Jeong Yong (Dep. of Materials Sci. and Engineering, KAIST, Daejeon 305-701, KOR)
Material： Applied Surface Science  (Appl Surf Sci)
Volume： 258  Issue： 12  Page： 5073-5079  Publication year： Apr. 01, 2012 
JST Material Number： B0707B  ISSN： 0169-4332  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *gallium ,  *doping ,  *zinc oxide ,  compound semiconductor ,  semiconductor thin film ,  *epitaxy ,  RF sputtering ,  magnetron sputtering ,  sputtered deposition ,  *buffer layer ,  alumina ,  substrate(plate) ,  preferred orientation ,  X-ray diffraction ,  hexagonal system ,  polycrystal ,  wurtzite type crystal ,  crystal growth ,  *electrical resistivity ,  carrier density ,  *optical constant ,  transparent conducting thin films
Semi thesaurus term： low temperature growth

JST classification (3)： Oxide thin films  (BK14050P) ,  Optical properties of condensed matter in general  (BM08010A) ,  Electric conduction in crystalline semiconductors  (BM03043X)

Terms in the title (7)： バッファ層 ,  Al2O3 ,  Ga ,  ドープ ,  ZnO薄膜 ,  低温 ,  エピタキシャル成長