About LI Ning
About Dep. of Materials Sci. and Engineering, Kitami Inst. of Technol., Kitami, Hokkaido 090-8507, JPN
About ABE Yoshio
About Dep. of Materials Sci. and Engineering, Kitami Inst. of Technol., Kitami, Hokkaido 090-8507, JPN
About KAWAMURA Midori
About Dep. of Materials Sci. and Engineering, Kitami Inst. of Technol., Kitami, Hokkaido 090-8507, JPN
About KIM Kyung Ho
About Dep. of Materials Sci. and Engineering, Kitami Inst. of Technol., Kitami, Hokkaido 090-8507, JPN
About SUZUKI Tsutomu
About Dep. of Biotechnology and Environmental Chemistry, Kitami Inst. of Technol., Kitami, Hokkaido 090-8507, JPN
About Thin Solid Films
About reactive sputtering
About sputtered deposition
About zirconium oxide
About mixed gas
About oxygen
About water vapor
About hydrogen peroxide
About electrical conductivity
About atmosphere(environment)
About ionic conductivity
About Oxide thin films
About Electric conduction in other inorganic compounds
About O2
About H2O
About 混合気体
About 反応性スパッタリング
About 調製
About ZrO2
About 薄膜
About イオン伝導率
About 評価