Art
J-GLOBAL ID：201302201012851995   Reference number：13A0702090

Spontaneous formation of aluminum germanate on Ge(100) by atomic layer deposition with trimethylaluminum and microwave-generated atomic oxygen

トリメチルアルミニウムとマイクロ波発生原子状酸素の原子層蒸着によるGe(100)上のゲルマニウム酸アルミニウムの自発的形成
Author (9)：
FUKUDA Yukio

About FUKUDA Yukio

(Tokyo Univ. of Sci., Suwa, 5000-1 Toyohira, Chino, Nagano 391-0292, JPN)

About Tokyo Univ. of Sci., Suwa, 5000-1 Toyohira, Chino, Nagano 391-0292, JPN

, 
ISHIZAKI Hiroki

About ISHIZAKI Hiroki

(Tokyo Univ. of Sci., Suwa, 5000-1 Toyohira, Chino, Nagano 391-0292, JPN)

About Tokyo Univ. of Sci., Suwa, 5000-1 Toyohira, Chino, Nagano 391-0292, JPN

, 
OTANI Yohei

About OTANI Yohei

(Tokyo Univ. of Sci., Suwa, 5000-1 Toyohira, Chino, Nagano 391-0292, JPN)

About Tokyo Univ. of Sci., Suwa, 5000-1 Toyohira, Chino, Nagano 391-0292, JPN

, 
YAMAMOTO Chiaya

About YAMAMOTO Chiaya

(Univ. of Yamanashi, 4-3-11 Takeda, Kofu, Yamanashi 400-8511, JPN)

About Univ. of Yamanashi, 4-3-11 Takeda, Kofu, Yamanashi 400-8511, JPN

, 
YAMANAKA Junji

About YAMANAKA Junji

(Univ. of Yamanashi, 7-32 Miyamae, Kofu, Yamanashi 400-8511, JPN)

About Univ. of Yamanashi, 7-32 Miyamae, Kofu, Yamanashi 400-8511, JPN

, 
SATO Tetsuya

About SATO Tetsuya

(Univ. of Yamanashi, 4-3-11 Takeda, Kofu, Yamanashi 400-8511, JPN)

About Univ. of Yamanashi, 4-3-11 Takeda, Kofu, Yamanashi 400-8511, JPN

, 
TAKAMATSU Toshiyuki

About TAKAMATSU Toshiyuki

(SST Inc., 989-6 Shimadadai, Yachiyo, Chiba 276-0004, JPN)

About SST Inc., 989-6 Shimadadai, Yachiyo, Chiba 276-0004, JPN

, 
OKAMOTO Hiroshi

About OKAMOTO Hiroshi

(Hirosaki Univ., 3 Bunkyo-cho, Hirosaki, Aomori 036-8561, JPN)

About Hirosaki Univ., 3 Bunkyo-cho, Hirosaki, Aomori 036-8561, JPN

, 
NARITA Hidehumi

About NARITA Hidehumi

(Hirosaki Univ., 3 Bunkyo-cho, Hirosaki, Aomori 036-8561, JPN)

About Hirosaki Univ., 3 Bunkyo-cho, Hirosaki, Aomori 036-8561, JPN


Material：
Applied Physics Letters  (Appl Phys Lett)

About Applied Physics Letters


Volume： 102  Issue： 13  Page： 132904-132904-4  Publication year： Apr. 01, 2013 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
chemical vapor deposition

About chemical vapor deposition

, 
atom

About atom

, 
*germanium

About germanium

, 
germanate

About germanate

, 
water

About water

, 
oxidizing agent

About oxidizing agent

, 
*MIS structure

About MIS structure

, 
*capacitance-voltage characteristic

About capacitance-voltage characteristic

, 
*trapping center

About trapping center

, 
X-ray photoelectron spectrum

About X-ray photoelectron spectrum

, 
*aluminum oxide

About aluminum oxide


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
atomic layer deposition

About atomic layer deposition

, 
oxygen atom

About oxygen atom

, 
*ゲルマニウム酸アルミニウム

About ゲルマニウム酸アルミニウム


JST classification (1)：
JST classification
Category name(code) classified by JST.
Metal-insulator-semiconductor structures 
(BM03085X)

About Metal-insulator-semiconductor structures

Substance index (1)：
Substance index
Chemical Substance indexed to the Article.
Trimethylaluminum

About Trimethylaluminum

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
トリメチルアルミニウム

About トリメチルアルミニウム

, 
マイクロ波発生

About マイクロ波発生

, 
原子状酸素

About 原子状酸素

, 
原子層蒸着

About 原子層蒸着

, 
Ge

About Ge

, 
ゲルマニウム酸

About ゲルマニウム酸

, 
アルミニウム

About アルミニウム


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