Art

J-GLOBAL ID：201302231731620101   Reference number：13A0949079

Passive piezoelectric single-side MEMS DC current sensor with five parallel PZT plates applicable to two-wire DC electric appliances without using cord separator

コード分離器を用いることなく2線DC電気製品に採用できる5個の並列PZT板を有する受動圧電片側MEMS DC電流センサ

Author (6)： WANG Dong F. (Dep. of Mechanical Engineering, Fac. of Engineering, Ibaraki Univ., Micro Engineering and Micro Systems Lab. ...) ,  ISAGAWA Kohei (Dep. of Mechanical Engineering, Fac. of Engineering, Ibaraki Univ., Micro Engineering and Micro Systems Lab. ...) ,  ISAGAWA Kohei (TDK Corp., 103-8272, Tokyo, JPN) ,  KOBAYASHI Takeshi (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Res. Center for Ubiquitous MEMS and Micro ...) ,  ITOH Toshihiro (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Res. Center for Ubiquitous MEMS and Micro ...) ,  MAEDA Ryutaro (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Res. Center for Ubiquitous MEMS and Micro ...)
Material： Microsystem Technologies  (Microsystem Technologies. Micro- and Nanosystems, Information Storage and Processing Systems)
Volume： 19  Issue： 6  Page： 923-927  Publication year： Jun. 2013 
JST Material Number： W2056A  ISSN： 0946-7076  Document type： Article
Article type： 原著論文  Country of issue： Germany, Federal Republic of (DEU)  Language： ENGLISH (EN)

Thesaurus term： piezoelectricity ,  manipulator ,  *MEMS ,  *current sensor ,  *lead zirconate titanate ,  magnet ,  cantilever beam ,  impulse voltage ,  robot
Semi thesaurus term： *PZT ,  impulse voltage ,  cantilever ,  bimorph ,  piezoelectric

JST classification (2)： Measuring methods and instruments of current,voltage,charge  (AD07020C) ,  Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (8)： 分離器 ,  DC ,  電気製品 ,  採用 ,  PZT ,  圧電 ,  MEMS ,  電流センサ