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J-GLOBAL ID:201302251859326894   Reference number:13A0853027

スパッタリング法によるアモルファスMg2Si系半導体の作製と評価

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Material:
Volume: 60th  Page: ROMBUNNO.30A-G7-4  Publication year: Mar. 11, 2013 
JST Material Number: Y0054B  ISSN: 2436-7613  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Semiconductor thin films  ,  Optical properties of condensed matter in general 
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