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J-GLOBAL ID:201302281750809581   Reference number:13A0605940

Structural and Electrical Properties of Ti-Doped ITiO Films by RF Magnetron Sputtering

RFマグネトロンスパッタリングによるTiドープITiO膜の構造と電気的性質
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Volume: 22  Page: 83-84  Publication year: Mar. 2013 
JST Material Number: L6242A  ISSN: 1340-9557  CODEN: POFZFU  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Oxide thin films  ,  Electric conduction in other inorganic compounds 
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