Epitaxial PZT films for MEMS printing applications

FUNAKUBO Hiroshi; DEKKERS Matthijn; SAMBRI Alessia; GARIGLIO Stefano; SHKLYAREVSKIY Igor; RIJNDERS Guus

Art

J-GLOBAL ID：201302294274316169 Reference number：13A0026869

Epitaxial PZT films for MEMS printing applications

MEMS印刷に応用するエピタキシャルPZT膜

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Volume： 37 Issue： 11 Page： 1030-1038 Publication year： Nov. 2012
JST Material Number： W1595A ISSN： 0883-7694 CODEN： MRSBEA Document type： Article
Article type：文献レビュー Country of issue： United States (USA) Language： ENGLISH (EN)

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Printing machine , Oxide thin films , Piezoelectricity,pyroelectricity,electret

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