Art

J-GLOBAL ID：201402204603998088   Reference number：14A0789191

Wide Color Variation in SiNO Thin Films Dispersed with Precipitated TiN Nano Particles

TiNナノ粒子を析出分散させたSiNO薄膜の広域色調変化

Author (4)： SAWADA Akinori (Hokkaido Univ., Sapporo, JPN) ,  MASUBUCHI Yuji (Hokkaido Univ., Sapporo, JPN) ,  MOTOHASHI Teruki (Hokkaido Univ., Sapporo, JPN) ,  KIKKAWA Shinichi (Hokkaido Univ., Sapporo, JPN)
Material： Journal of the American Ceramic Society  (J Am Ceram Soc)
Volume： 97  Issue： 5  Page： 1356-1358  Publication year： May. 2014 
JST Material Number： C0253A  ISSN： 0002-7820  CODEN： JACTAW  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *silicon compound ,  oxide ,  insulating film ,  nitride ,  thin film ,  *ceramic membrane ,  substrate(plate) ,  silica glass ,  *magnetron sputtering ,  RF sputtering ,  sputtered deposition ,  *ammonia ,  *annealing(heat treatment) ,  target ,  silicide ,  *titanium compound ,  membrane and film ,  amorphous state ,  nano particle ,  *precipitation(phase separation) ,  visible spectrum ,  ultraviolet spectrum ,  hue ,  plasmon ,  sheet resistance
Semi thesaurus term： annealing (heat treatment) ,  *titanium silicide ,  silica glass ,  *silicon oxynitride ,  ultraviolet and visible spectrum ,  color hue ,  titanium nitride ,  amorphous film

JST classification (3)： Thin films of other inorganic compounds  (BK14060A) ,  Visible and ultraviolet spectra of inorganic compounds  (BM08084P) ,  Electric conduction in other inorganic compounds  (BM03044O)

Terms in the title (6)： TiN ,  ナノ粒子 ,  析出 ,  薄膜 ,  広域 ,  色調変化