Art
J-GLOBAL ID：201402230317417346   Reference number：14A0426434

EFFECT OF O2 INTRODUCTION PROPERTY OF Al DOPED CeO2 FILMS DEPOSITED BY SPUTTERING METHOD

スパッタリング法で堆積したAlドープCeO2膜の酸素導入効果
Author (8)：
HARA K.

About HARA K.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN

, 
OKAZAKI T.

About OKAZAKI T.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN

, 
NOTANI Y.

About NOTANI Y.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN

, 
OSAWA T.

About OSAWA T.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN

, 
HIBINO K.

About HIBINO K.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN

, 
SUZUKI S.

About SUZUKI S.

(Comet Inc., Ibaraki, JPN)

About Comet Inc., Ibaraki, JPN

, 
ISHIBASHI K.

About ISHIBASHI K.

(Comet Inc., Ibaraki, JPN)

About Comet Inc., Ibaraki, JPN

, 
YAMAMOTO Y.

About YAMAMOTO Y.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN


Material：
Report of Research Center of Ion Beam Technology, Hosei University. Supplement  (法政大学イオンビーム工学研究所報告 別冊)

About Report of Research Center of Ion Beam Technology, Hosei University. Supplement


Issue： 32  Page： 46-51  Publication year： Mar. 2014 
JST Material Number： L0263A  ISSN： 0914-2908  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
rate of sedimentation

About rate of sedimentation

, 
crystallization

About crystallization

, 
oxygen deficiency

About oxygen deficiency

, 
*sputtered deposition

About sputtered deposition

, 
thin film

About thin film

, 
X-ray photoelectron spectrum

About X-ray photoelectron spectrum

, 
Aluminum

About Aluminum

, 
doping

About doping

, 
oxide film

About oxide film

, 
cerium oxide

About cerium oxide

, 
electron diffraction

About electron diffraction

, 
X-Ray Diffraction

About X-Ray Diffraction

, 
electron microscopy

About electron microscopy

, 
Oxygen

About Oxygen

, 
*cerium dioxide

About cerium dioxide

, 
Microscopy, Electron, Transmission

About Microscopy, Electron, Transmission

, 
conversion coating film

About conversion coating film


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
sputter deposition

About sputter deposition


JST classification (1)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
スパッタリング法

About スパッタリング法

, 
堆積

About 堆積

, 
Al

About Al

, 
ドープ

About ドープ

, 
CeO2

About CeO2

, 
酸素

About 酸素

, 
導入効果

About 導入効果


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