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J-GLOBAL ID:201402231392672790   Reference number:14A1382575

A Study of BCN production process by thermal chemical vapor deposition

熱化学気相成長法によるBCN合成の検討
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Volume: 114  Issue: 276(CPM2014 100-121)  Page: 13-14  Publication year: Oct. 17, 2014 
JST Material Number: S0532B  ISSN: 0913-5685  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Semiconductor thin films 
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